Microfabricated implantable wireless pressure sensor for use...

Microfluidic measuring tool to measure through-silicon via...

Micromachined acoustic transducer and method of operating...

Micromachined capacitive RF pressure sensor

Micromachined differential pressure transducers

Micromachined diffractive pressure sensor system

Micromachined integrated pressure sensor with oxide polysilicon

Micromechanical component and equalization method

Micromechanical component and method

Micromechanical component and method

Micromechanical component and pressure sensor having a...

Micromechanical component having a sealed cavity and at...

Micromechanical component protected from environmental...

Micromechanical differential pressure sensor device

Micromechanical high-pressure sensor

Micromechanical piezoresistive pressure sensor device

Micromechanical pressure gauge having extended sensor range

Micromechanical pressure sensor

Micromechanical pressure sensor system

Micromechanical pressure sensor-with improved range