Microfluidic measuring tool to measure through-silicon via...

Details Microfluidic measuring tool to measure through-silicon via... Microfluidic measuring tool to measure through-silicon via...

2011-03-08

2011-03-08

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C257S048000

Reexamination Certificate

active

07900519

ABSTRACT:
A tool to measure the depth of one or more through-silicon vias, the tool fabricated in silicon to include a microfluidic chamber that is positioned over the one or more through-silicon vias, further including a fluid actuation chamber to inject fluid into the microfluidic chamber and into the one or more through-silicon vias, and a pressure sensing chamber to sense the fluid pressure to indicate when the one or more through-silicon vias are filled with the fluid.

REFERENCES:
patent: 6993966 (2006-02-01), Stenmark
patent: 2003/0061890 (2003-04-01), Chen
patent: 2005/0199078 (2005-09-01), Temmler
patent: 2007/0007429 (2007-01-01), Fairley
patent: 2007/0293052 (2007-12-01), Le Roy et al.
patent: 2009/0200547 (2009-08-01), Griffin et al.
patent: 2010/0263793 (2010-10-01), Ylitalo et al.
patent: 61025005 (1986-02-01), None
International Search Report-PCT/ US2010/038371, International Search Authority-European Patent Office Oct. 15, 2010.
Written Opinion-PCT/ US2010/038371, International Search Authority-European Patent Office Oct. 15, 2010.

Affiliated with

Also associated with

Rating

Microfluidic measuring tool to measure through-silicon via... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microfluidic measuring tool to measure through-silicon via..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microfluidic measuring tool to measure through-silicon via... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2688769