Micromechanical component having a sealed cavity and at...

Details Micromechanical component having a sealed cavity and at... Micromechanical component having a sealed cavity and at...

2007-07-17

2007-07-17

Noori, Max (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

Reexamination Certificate

active

11023121

ABSTRACT:
A micromechanical component having a substrate, a cavity formed in the substrate, a membrane provided on the surface of the substrate, which seals the cavity, the membrane having at least two layers between which one or several piezoelectric or piezoresistive circuit trace strip(s) is/are embedded, and a corresponding manufacturing method therefor.

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