Micromechanical component and method

Details Micromechanical component and method Micromechanical component and method

2008-07-29

2008-07-29

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Mounting and connection

Reexamination Certificate

active

10529420

ABSTRACT:
A micromechanical component and a method for producing a micromechanical component are proposed, a hollow space and a region of porous silicon being provided, the region of porous silicon being provided for lowering the pressure prevailing in the hollow space.

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Henmi et al.,Vacuum Packaging for Microsensors by Glass-Silicon Anodic Bonding, Sensors and Actuators, Lausanne, Switzerland, May 1, 1994, vol. A43, No. 1/3, pp. 243-248.

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