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Positive tone bi-layer imprint lithography method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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Post CU CMP polishing for reduced defects

Etching a substrate: processes – Planarizing a nonplanar surface
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Post etch inspection system

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Post exposure resist bake

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Post exposure resist bake

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Potassium hydrogen peroxymonosulfate solutions

Etching a substrate: processes – Nongaseous phase etching of substrate
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Power control and delivery in plasma processing equipment

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Power distribution architecture for inkjet heater chip

Etching a substrate: processes – Forming or treating thermal ink jet article
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Pre-endpoint techniques in photoresist etching

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Pre-etch implantation damage for the removal of thin film...

Etching a substrate: processes – Nongaseous phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Pre-treatment of plastic materials

Etching a substrate: processes – Nongaseous phase etching of substrate
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Precise, in-situ endpoint detection for charged particle...

Etching a substrate: processes – Pattern or design applied by transfer
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Precision dielectric etch using hexafluorobutadiene

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Preferential etching method and silicon single crystal...

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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Preparation and coating of composite surfaces

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Preparation of colored optical fiber for splicing

Etching a substrate: processes – Forming or treating optical article
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Preparation of silicon substrate

Etching a substrate: processes – Forming groove or hole in a substrate which is subsequently...
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Prevention of damage due to static electricity during...

Etching a substrate: processes – Forming or treating article containing magnetically...
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Prevention of edge stain in silicon wafers by oxygen annealing

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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Print head constructions for reduced electrostatic interaction b

Etching a substrate: processes – Forming or treating thermal ink jet article
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