Etching a substrate: processes – Forming or treating article containing magnetically...
Reexamination Certificate
1998-12-11
2001-07-31
Alanko, Anita (Department: 1746)
Etching a substrate: processes
Forming or treating article containing magnetically...
C029S603070, C204S192340, C360S323000
Reexamination Certificate
active
06267903
ABSTRACT:
BACKGROUND OF THE INVENTION
The present invention relates to a method of manufacturing a magnetic head, and more precisely relates to a method of manufacturing a magnetic head, which is capable of preventing an element or elements from being damaged by static electricity which is generated while manufacturing the magnetic head.
The magnetic heads for magnetic disc drive units are manufactured by the steps of: forming magnetizable film layers and non-magnetizable film layers on a surface of a ceramic substrate, which is formed into a wafer; and patterning the film layers. To execute the patterning step, first a resist layer is formed on the film layers and formed into prescribed patterns, then the film layers, which are masked with the patterned resist layer, are patterned by ion milling, sputtering, etc.
While executing treatments of the film layers, e.g., trimming by ion milling, pattern etching by dry etching, cleaning the surface of the film layers by sputter-etching, static electricity is charged on the surface of the film layers; the static electricity damages sensing parts of element sections of the magnetic heads and badly influences characteristics of the magnetic heads. To solve these disadvantages, an ion milling device neutralizes ions so as not to charge the static electricity in a work piece.
In the conventional method of manufacturing the magnetic head, damaging the element sections by static electricity was not a serious problem. However, in the case of spin valve heads capable of writing data with high density, the element sections are apt to be damaged by static electricity, so it is necessary to protect the element sections from the static electricity. In conventional magnetic heads, about 20 [V] of static electricity damages the element sections; in spin valve heads, about 5 [V] of static electricity damages the element sections.
In some cases, the film layers are etched to form into a plurality of isolated islands, so influences of static electricity must be prevented.
SUMMARY OF THE INVENTION
An object of the present invention is to provide a method of manufacturing a magnetic head which is capable of preventing the element sections from being damaged by static electricity and which is capable of keeping prescribed characteristics of the magnetic head. Another object is to provide a method of manufacturing a magnetic head, which is capable of highly improving yield of manufacturing.
To achieve the objects, the method of manufacturing the magnetic head comprises the steps of: forming film layers on a surface of a substrate; etching the film layers to form into prescribed patterns; and forming an element section having prescribed characteristics, wherein a specific section of the substrate, in which the element section is formed, is enclosed by electric conductive film.
In the method, an electric conductive layer, in which a sensing part of the element section is formed, may be formed on the substrate, then the specific section is etched to form the element section.
In the method, an upper shielding layer may be formed on the sensing part of the element section after the sensing part is formed, then the electric conductive layer around the element section may be removed.
Another method of manufacturing the magnetic head comprises the steps of: forming film layers on a surface of a substrate; etching the film layers into prescribed patterns; and forming a plurality of element sections having prescribed characteristics, wherein cable patterns, which are connected to terminals of the element sections or coils, are mutually connected for further treatment.
In the method, write-heads of the element sections may be formed by the steps of: forming a write-gap layer; an electric conductive film, which is formed into the cable patterns, is formed on the write-gap layer; and etching the electric conductive film to mutually connect the cable patterns.
In the methods, each of the etching may be executed by ion milling.
In each of the methods, the electric conductive film may be electrically grounded for further treatment.
In the method of the present invention, the specific section of the substrate, in which the element section is formed, is enclosed by electric conductive film, then the film layers are etched by ion milling or piled by sputtering. During the manufacturing process, electric current caused by static electricity is prevented from passing through the sensing part of the element section, so that damaging the element sections can be prevented and the yield of manufacturing can be highly improved.
The electric conductive film is left when the electric conductive layer and the shielding layer of the sensing part are etched, so the magnetic head can be manufactured without sharply changing the conventional method.
By connecting the electric conductive film to the ground or by mutually connecting the terminals of the element sections, damaging the element sections can be effectively prevented.
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Alanko Anita
Fujitsu Limited
Greer Burns & Crain Ltd.
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