Stabilized servo motor positioning apparatus
Stage apparatus and lithographic apparatus
Stage apparatus including non-containing gas bearings and...
Stage assembly and exposure apparatus including the same
Stage device capable of applying a damping force to a movable me
Stage driving system
Stage feeding device
Stage system and exposure apparatus using the same
Stage-drive control apparatus and method, and scan-projection ty
Stagger feed control circuit
Staggered seeking method for disk drive sector servo
Start of scan circuit for FTIR spectrometer
Start-up control for switched reluctance motor
Start-up procedure for brushless DC motors having position...
Starting circuit and starting method for a brushless motor
Starting of synchronous machine without rotor position of speed
Starting of synchronous machine without rotor position or...
Starting-point returning apparatus for robot
State memorizing device for movable member
Statically stable biped robotic mechanism and method of...