Stage apparatus and lithographic apparatus

Details Stage apparatus and lithographic apparatus Stage apparatus and lithographic apparatus

2006-09-20

2008-03-25

Ro, Bentsu (Department: 2837)

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

C318S632000

Reexamination Certificate

active

07348752

ABSTRACT:
A stage apparatus and a lithographic apparatus comprising such a stage apparatus are described. The stage apparatus includes an electromagnetic motor arranged to displace an object table, an electromagnetic actuator configured to position the object table and a device configured to provide a current to the stage apparatus such that, in use, an effect of a stray field of the electromagnetic motor on the electromagnetic actuator is at least partly compensated by the current.

REFERENCES:
patent: 5304811 (1994-04-01), Yamada et al.
patent: 6441514 (2002-08-01), Markle
patent: 6531793 (2003-03-01), Frissen et al.
patent: 6608317 (2003-08-01), Nakasuji
patent: 6770890 (2004-08-01), Tanaka
patent: 6864601 (2005-03-01), Sogard
patent: 7224429 (2007-05-01), Hol et al.
patent: 2002/0096647 (2002-07-01), Moors et al.
patent: 2003/0155820 (2003-08-01), Tominaga et al.

Affiliated with

Also associated with

Rating

Stage apparatus and lithographic apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stage apparatus and lithographic apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage apparatus and lithographic apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3973121