X- And y-axis driver for rotating microspheres
X-Y Addressable workpiece positioner and mask aligner using same
X-Y addressable workpiece positioner and mask aligner using same
X-Y addressable workpiece positioner and mask aligner using same
X-Y Addressable workpiece positioner having an improved X-Y addr
X-Y positioner based on X axis motions
X-Y Positioning subsystem electronics
XY drive apparatus equipped with a linear electromagnetic actuat
Xy-surface drive having limited .phi.-rotation and z-movement
XYZ-axes table
XYZ-axes table