Stage driving system

Details Stage driving system Stage driving system

1993-02-18

1996-04-02

Sircus, Brian

Electricity: motive power systems

Positional servo systems

Program- or pattern-controlled systems

318592, 318611, 318623, G06F 1546

Patent

active

055044077

ABSTRACT:
A stage driving system capable of positioning an object with a higher speed and a higher precision than prior systems. The system includes a base member, plural movable members provided on the base member, and a controller for controlling the plural movable members so as to substantially suppress the vibration of the base member caused by the displacements of the plural movable members.

REFERENCES:
patent: 3656014 (1972-04-01), Rich
patent: 3904945 (1975-09-01), Hassan et al.
patent: 4525659 (1985-06-01), Imahashi et al.
patent: 4653903 (1987-03-01), Torigoe et al.
patent: 4843293 (1989-06-01), Futami
patent: 4929874 (1990-05-01), Mizuno et al.
patent: 4952858 (1990-08-01), Galburt
patent: 5008606 (1991-04-01), Koehler et al.
patent: 5055760 (1991-10-01), Nashiki et al.
patent: 5153494 (1992-10-01), Hollis, Jr.
patent: 5187519 (1993-02-01), Takabayashi et al.
patent: 5208497 (1993-05-01), Ishii et al.
patent: 5260580 (1993-11-01), Itoh et al.
patent: 5315526 (1994-05-01), Maeda et al.
patent: 5432422 (1995-07-01), Nagano et al.
Japanese Society for Precision Engineering, "Air Bearing Guided High Speed XY Stage", by Hiroo Kinoshita, et al., Oct. 1986, pp. 47-52.
Patent Abstracts of Japan, vol. 7, No. 78 (P-188) published Mar. 31, 1983, English Abstract of Japanese Patent No. 58-009133.

Affiliated with

Also associated with

Rating

Stage driving system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stage driving system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage driving system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2018809