Stage feeding device

Details Stage feeding device Stage feeding device

1997-08-28

1999-08-17

Ip, Paul

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318632, 318623, 73662, 73664, 36416701, G05B 501, G05B 1918

Patent

active

059398523

ABSTRACT:
A stage feeding device has a movable guide which is guided on a reference surface of a platen to be movable in the Y-direction, a Y-linear motor for moving the movable guide in the Y-direction, a movable stage which is supported by the movable guide to be movable in the X-direction, and carries an object, and an X-linear motor for moving the movable stage in the X-direction. The stator of the X-linear motor is supported by a second stationary guide to be movable in only the Y-direction independently of the movable guide, and is moved in the Y-direction by a driving mechanism. The stator of the Y-linear motor and the second stationary guide are fixed to the base, and mount members for removing vibrations are arranged between the base and the platen.

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patent: 5543726 (1996-08-01), Boyette, Jr. et al.
patent: 5610686 (1997-03-01), Osanai

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