Stage device capable of applying a damping force to a movable me

Details Stage device capable of applying a damping force to a movable me Stage device capable of applying a damping force to a movable me

1995-11-08

1998-02-03

Sircus, Brian

Electricity: motive power systems

Positional servo systems

Adaptive or optimizing systems including 'bang-bang' servos

318611, G05B 1300

Patent

active

057148600

ABSTRACT:
A stage device comprises a base, a movable member movably provided on the base, a damping system for giving a damping force to the movable member, a position detector for detecting a position of the movable member with respect to the base, a deviation detector for obtaining a deviation of a position of the movable member from a target position of the movable member on the base on the basis of a result of the detection by the position detector and a damping control system for changing the damping force in accordance with the deviation detected by the deviation detector.

REFERENCES:
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patent: 3940676 (1976-02-01), Dudley
patent: 4007412 (1977-02-01), Vold
patent: 4591772 (1986-05-01), Hollow
patent: 4890023 (1989-12-01), Hinds et al.
patent: 5223778 (1993-06-01), Svarovsky et al.
patent: 5389862 (1995-02-01), Tominaga
patent: 5419492 (1995-05-01), Gant et al.
patent: 5446519 (1995-08-01), Makinouchi
patent: 5572558 (1996-11-01), Beherns
patent: 5633720 (1997-05-01), Takahashi

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