Stage system and exposure apparatus using the same

Details Stage system and exposure apparatus using the same Stage system and exposure apparatus using the same

1999-02-01

2000-12-05

Martin, David

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318 35, 318 51, 318 90, 318160, 108 20, 248562, 414936, B64C 1706

Patent

active

061571598

ABSTRACT:
A stage system includes a stage movable along a path, a first driving mechanism for accelerating or decelerating the stage on the basis of a resilience force of a resilient member, a first holding mechanism for holding a resilience force being accumulated through compression of the resilient member of the first driving mechanism, and a second holding mechanism for holding a resilience force being accumulated through extension of the resilient member of the first driving mechanism, wherein resilience energy of the resilient member is used for stage acceleration, which is very effective to prevent large heat generation, and wherein resilient energy accumulated in the resilient member during deceleration is used for subsequent stage acceleration, which is very effective for energy efficiency and for heat generation suppression.

REFERENCES:
patent: 4764815 (1988-08-01), Landsman
patent: 5467720 (1995-11-01), Korenaga et al.
patent: 5504407 (1996-04-01), Wakui et al.
patent: 5518550 (1996-05-01), Korenaga et al.
patent: 5726542 (1998-03-01), Ebihara
patent: 5841250 (1998-11-01), Korenage et al.
patent: 5874820 (1999-02-01), Lee
patent: 6037680 (2000-03-01), Korenaga et al.

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