Anti-stick electrostatic chuck for a low pressure environment

Apparatus and method for actively controlling surface...

Apparatus and method for actively controlling the DC potential o

Apparatus and method for ex-situ testing of performance paramete

Apparatus and method for improving uniformity and charge...

Apparatus and method for joining two substrates

Apparatus and method for removal of surface oxides via...

Apparatus and method for removal of surface oxides via...

Apparatus and method for selective environmental conditioning of

Apparatus and method for separating adhering media electrostatic

Apparatus and method for stunning animals for slaughter

Apparatus and method for temperature control of workpieces in va

Apparatus and method to angularly position micro-optical...

Apparatus and methods for compensating plasma sheath...

Apparatus for charging field electrical cables

Apparatus for controlling atmospheric humidity

Apparatus for controlling backside gas pressure beneath a semico

Apparatus for controlling random charges on a moving web

Apparatus for discouraging animals from a selected area

Apparatus for energy extraction-I