LandOfFree - US Patents - Listing for Electricity: electrical systems and devices,Electric charge generating or conducting means,Use of forces of electric charge or field

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Substrate support apparatus and method for fabricating same

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Substrate support having heat transfer system

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Substrate support member for uniform heating of a substrate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Substrate support pedestal

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Substrate support tolerant to thermal expansion stresses

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Substrate support with pressure zones having reduced contact are

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Support for supporting a substrate in a process chamber

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Support platen with removable insert useful in semiconductor pro

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Surface structure and method of making, and electrostatic...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Susceptor and manufacturing method thereof

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

System and method for dechucking a workpiece from an...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

System and method for optimizing the electrostatic removal...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

System for receiving and retaining a substrate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

System for transporting and electrostatically chucking a...