Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate
2007-05-22
2007-05-22
Sircus, Brian (Department: 2836)
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
C361S233000
Reexamination Certificate
active
10421473
ABSTRACT:
A support for a substrate processing chamber has upper and lower walls that are joined by a peripheral sidewall to define a reservoir. A fluid inlet supplies a heat transfer fluid to the reservoir. In one version, a plurality of protrusions extends into the reservoir to perturb the flow of the heat transfer fluid through the reservoir. In another version, the reservoir is an elongated channel having one or more of (i) serpentine convolutions, (ii) integral fins extending into the channel, (iii) a roughened internal surface, or (iv) a changing cross-section. A fluid outlet discharges the heat transfer fluid from the reservoir.
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Leyda, Bryan D., “Duocel Aluminum Foam”, product information from ERG Materials and Aerospace Corporation, Oakland, CA, publication date unknown.
Cheng Wing Lau
Hanawa Hiroji
Hoffman Daniel J.
Ishikawa Tetsuya
Kats Semyon L.
Applied Materials Inc.
Janah & Associates
Nguyen Danny
Sircus Brian
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