Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate
2005-11-15
2005-11-15
Sircus, Brian (Department: 2836)
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
Reexamination Certificate
active
06965506
ABSTRACT:
The present invention comprises a system and method for determining the reverse voltage and time to apply to the dechucking of a workpiece from an electrostatic chuck (ESC). The system for dechucking comprises a processing chamber operatively coupled to a microprocessor and a memory that is configured to determine the dechucking parameters for the workpiece. The method for determining dechucking parameters comprises generating a correlation between ESC resistance and dechucking parameters, performing a single experimental test on a new ESC and generating a fitting parameter, and using the correlation and the fitting parameter to determine the dechucking parameters.
REFERENCES:
patent: 4724621 (1988-02-01), Hobson et al.
patent: 5103367 (1992-04-01), Horwitz et al.
patent: 5117121 (1992-05-01), Watanabe et al.
patent: 5179498 (1993-01-01), Hongoh et al.
patent: 5221450 (1993-06-01), Hattori et al.
patent: 5325261 (1994-06-01), Horwitz
patent: 5444597 (1995-08-01), Blake et al.
patent: 5459632 (1995-10-01), Birang et al.
patent: 5463525 (1995-10-01), Barnes et al.
patent: 5474614 (1995-12-01), Robbins
patent: 5491603 (1996-02-01), Birang et al.
patent: 5507874 (1996-04-01), Su et al.
patent: 5539609 (1996-07-01), Collins et al.
patent: 5552955 (1996-09-01), Mashiro et al.
patent: 5557215 (1996-09-01), Saeki et al.
patent: 5566744 (1996-10-01), Tepman
patent: 5573981 (1996-11-01), Sato
patent: 5612850 (1997-03-01), Birang et al.
patent: 5677824 (1997-10-01), Harashima et al.
patent: 5684669 (1997-11-01), Collins et al.
patent: 5699223 (1997-12-01), Mashiro et al.
patent: 5708250 (1998-01-01), Benjamin et al.
patent: 5708556 (1998-01-01), van Os et al.
patent: 5737177 (1998-04-01), Mett et al.
patent: 5764471 (1998-06-01), Burkhart
patent: 5793192 (1998-08-01), Kubly et al.
patent: 5818682 (1998-10-01), Loo
patent: 5838528 (1998-11-01), Os et al.
patent: 5847918 (1998-12-01), Shufflebotham et al.
patent: 5874361 (1999-02-01), Collins et al.
patent: 5876119 (1999-03-01), Ishikawa et al.
patent: 5880924 (1999-03-01), Kumar et al.
patent: 5894400 (1999-04-01), Graven et al.
patent: 5933314 (1999-08-01), Lambson et al.
patent: 5956837 (1999-09-01), Shiota et al.
patent: 6125025 (2000-09-01), Howald et al.
patent: 6163448 (2000-12-01), Hausmann
patent: 6215640 (2001-04-01), Hausmann
patent: 6236555 (2001-05-01), Leeser
patent: 6307728 (2001-10-01), Leeser
patent: 6430022 (2002-08-01), Leeser
patent: 6489776 (2002-12-01), Stowe et al.
patent: 0 680 083 (1995-11-01), None
patent: 0 694 949 (1996-01-01), None
patent: 0 710 055 (1996-05-01), None
patent: 0 831 526 (1998-03-01), None
patent: 2 293 689 (1996-04-01), None
patent: 07 074231 (1995-03-01), None
patent: 97 12396 (1997-04-01), None
Matsumoto et al., Effect of Heat Treatment on the Coefficient βpffor the Poole-Frenkel Effect and the Conductivity in Ta2O Films, Jan. 1980, Japanese Journal of Applied Physics, vol. 19, No. 1, pp. 71-77.
U.S. Appl. No. 09/163,368, entitled “Dechucking Method and Apparatus for Workpieces in Vacuum Processors,” filed Sep. 30, 1998, inventors: Howald et al.
Benenson Boris
IP Strategy Group PC
Lam Research Corporation
Sircus Brian
LandOfFree
System and method for dechucking a workpiece from an... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System and method for dechucking a workpiece from an..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for dechucking a workpiece from an... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3514986