Piezoelectric driving type MEMS apparatus
Piezoelectric-driven MEMS device and method for...
Planar micro-actuator
Pleated sheet microelectromechanical transducer
Polymer microactuator array with macroscopic force and...
Polymer microactuator array with macroscopic force and...
Porous gas reservoir electrostatic transducer
Precision electrostatic actuation and positioning
Robot hand for electrostatically applying thin workpiece to mold
Rolling triboelectric generator
Rotary electrostatic microactuator
Rotary electrostatic microactuator
Rotary microactuator having optimally curved electrodes
Rotary-type comb-drive actuator and variable optical...
Rotational actuator of motor based on carbon nanotubes
Rotational actuator or motor based on carbon nanotubes
Rotational motion based, electrostatic power source and...
Semiconductor microactuator with an improved platform...
Shock-resistant, electrostatically actuated pick-up for optical
Single stage microactuator for multi-dimensional actuation