Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate
2005-04-27
2008-12-02
Schuberg, Darren (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Charge accumulating
Reexamination Certificate
active
07459827
ABSTRACT:
A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
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Abe Kazuhide
Kawakubo Takashi
Nagano Toshihiko
Nishigaki Michihiko
Addison Karen
Kabushiki Kaisha Toshiba
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Schuberg Darren
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