Planar micro-actuator

Details Planar micro-actuator Planar micro-actuator

1994-05-31

1995-10-24

Skudy, R.

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

310 12, H02N 100

Patent

active

054612721

ABSTRACT:
This invention provides a planar micro-actuator in which power feed to slider electrodes is facilitated, whose reliability is remarkably improved, and by which a sub-system can be reliably realized.
In a planar micro-actuator of the type wherein an insulating fluid is sealed between stators so disposed as to oppose each other with a predetermined gap and a slider is movably disposed between the stators, the stators are equipped with power feed paths, the slider is equipped with metal bumps in electrical contact with the power feed paths, and power is fed to the slider through the power feed paths and through the metal bumps. Guide grooves for guiding the metal bumps are preferably formed in the power feed paths, and each power feed path is disposed on the electrode of the stator through an insulating layer to thereby improve the wiring density. By such a structure, the size and weight of the planar micro-actuator can be reduced while preventing undesirable deviation of the slider.

REFERENCES:
patent: 5235225 (1993-10-01), Colgate

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