Micromachined ultrasonic transducer cells having compliant...

Micromechanical actuator with asymmetrically shaped electrodes

Micromechanical device

Micromechanical device having braking mechanism

Micromechanical device with piezoelectric and electrostatic...

Micromechanical electrostatic resonator

Micromechanical platform pivotal on a compliant member

Micromechanical rotation system with coupled actuators

Micromechanical, capacitative ultrasound transducer and...

Micromirror actuator

Micromotion mechanical structure and a process for the productio

Micropositioner systems and methods

Miniature device with bossed suspension member

Miniature device with translatable member

Modulation in micromachined ultrasonic transducers

Motion based, electrostatic power source and methods thereof

Movable device

Movable MEMS-based noncontacting device

Multi-layer, self-aligned vertical combdrive electrostatic...

Multi-step microactuator providing multi-step displacement...