Discharge apparatus having hollow cathode

Discharge generating apparatus and discharge generating method

Discharge plasma generating method, discharge plasma...

Discharge plasma processing system

Discharge reaction apparatus utilizing dynamic magnetic field

Discharge tube having multiple electrodes arranged in tandem

Discharge-in-magnetic-field type ion generating apparatus

Dissociator for atomic masers

Distorted field radio frequency ion source

Distributed inductively-coupled plasma source and circuit...

Double chamber ion implantation system

Double-chamber ion source

Driving frequency modulation system and method for plasma...

Dual discharge plasma device

Dual filament ion source

Dual mode ion source for ion implantation

Dual plasma beam sources and method

Dual plasma source for plasma process chamber

E-beam/microwave gas jet PECVD method and apparatus for depositi

ECR apparatus with magnetic coil for plasma refractive index con