Double-chamber ion source

Details Double-chamber ion source Double-chamber ion source

1987-05-27

1989-06-20

Moore, David K.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

313161, 313230, 31323131, 3133591, 31511141, 315358, 250423R, G01T 120, H01J 2700

Patent

active

048411973

ABSTRACT:
Ion source including an electric discharge chamber body divided by a partition, having an anode electrode therein, into a main discharge chamber and a subsidiary discharge chamber. The subsidiary discharge chamber has a filament mounted therein aligned with at least one small opening through the partition wall and the anode electrode. An inert gas opening is provided into the subsidiary discharge chamber. An electric discharge gas opening and an ion outlet opening are provided to the main discharge chamber. Magnets are provided outside of the chamber body for creating a magnetic field extending nearly along an axis of the at least one small opening in the anode electrode.

REFERENCES:
patent: 3315125 (1967-04-01), Frohlich
patent: 3678334 (1972-07-01), Dugdale et al.
patent: 3702416 (1972-11-01), Bex et al.
patent: 3924134 (1975-12-01), Uman et al.
patent: 4123686 (1978-10-01), Keller et al.
patent: 4288716 (1981-09-01), Hinkel et al.
patent: 4412153 (1983-10-01), Kalbfus et al.
patent: 4684848 (1987-08-01), Kaufman et al.
patent: 4697085 (1987-09-01), Magee et al.
patent: 4749912 (1988-06-01), Hara et al.

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