ECR apparatus with magnetic coil for plasma refractive index con

Details ECR apparatus with magnetic coil for plasma refractive index con ECR apparatus with magnetic coil for plasma refractive index con

1992-07-17

1994-04-26

Pascal, Robert J.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

118723MR, 31511181, H01J 724, C23C 1600

Patent

active

053069854

ABSTRACT:
The present invention describes a technique to control the radial profile of microwave power in an ECR plasma discharge. In order to provide for a uniform plasma density to a specimen, uniform energy absorption by the plasma is desired. By controlling the radial profile of the microwave power transmitted through the microwave window of a reactor, the profile of the transmitted energy to the plasma can be controlled in order to have uniform energy absorption by the plasma. An advantage of controlling the profile using the window transmission characteristics is that variations to the radial profile of microwave power can be made without changing the microwave coupler or reactor design.

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