Triggering device for a vacuum arc in a plasma centrifuge

Two-stage hall effect plasma accelerator including plasma...

Unbalanced ion source

Uniform insulation applied-B ion diode

Universal cold-cathode type ion source with closed-loop electron

Vacuum gauge

Vacuum plasma processor having coil with added conducting segmen

Vacuum plasma processor having coil with intermediate...

Vapor and ion source

VHF/UHF reactor system

Wafer area pressure control

Wafer area pressure control for plasma confinement

Wafer holding apparatus for ion implantation

Waveguide and microwave ion source equipped with the waveguide

Wide area source of multiply ionized atomic or molecular species

Wide area VUV lamp with grids and purging jets

Wire ion plasma gun

Wire-ion-plasma electron gun employing auxiliary grid