RF power control device for RF plasma applications
RF power control device for RF plasma applications
RF tuning method for an RF plasma reactor using frequency...
RF-powered plasma accelerator/homogenizer
Scalable helicon wave plasma processing device with a non-cylind
Scanned electron cyclotron resonance plasma source
Section of pipe for a gas treatment device and device...
Segmented gate drive for dynamic beam shape correction in...
Selective ion source
Selectively controllable gas feed zones for a plasma reactor
Self-balancing circuit for convection air ionizers
Semiconductor processing apparatus
Semiconductor wafer treating device utilizing a plasma
Shielded rf antenna
Shutter linkage for an ion implantation apparatus
Simultaneous discharge apparatus
Slotted waveguide structure for generating plasma discharges
Slow-wave induction plasma transport
Solenoid and monocusp ion source
Source and method for generating high-density plasma with induct