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Ion implanter with multi-level vacuum

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Reexamination Certificate

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Ion implanting system

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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Ion implanting system

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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Ion plasma beam generating device

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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Ion plasma electron gun

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Ion plasma electron gun

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Ion plasma electron gun

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Ion plasma electron gun with dose rate control via amplitude mod

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Ion plating apparatus

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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Ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the...
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Ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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Ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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Ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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Ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Patent

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Ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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Ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Patent

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Ion source and operation method thereof

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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Ion source apparatus and method

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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Ion source device

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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