High density plasma tool with adjustable uniformity and...
High electric field, high pressure light source
High energy cathode device with elongated operating cycle time
High frequency coupler, and plasma processing apparatus and...
High frequency discharging method and apparatus, and high...
High frequency discharging method and apparatus, and high...
High frequency inductive generator for the inductive coil of a p
High frequency plasma power source and impedance matching device
High frequency power source having corrected power output
High frequency power source, plasma processing apparatus,...
High frequency transistor oscillator system
High power, long focus electron source for beam processing
High temperature reaction apparatus
High voltage crossed-field plasma switch
High-current, low-pressure plasma-cathode electron gun
High-density plasma source
High-density plasma source
High-density plasma source using excited atoms
High-efficient ion source with improved magnetic field
High-frequency electron source