High-efficient ion source with improved magnetic field

Details High-efficient ion source with improved magnetic field High-efficient ion source with improved magnetic field

2006-10-03

2006-10-03

Lee, Wilson (Department: 2821)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

C313S361100, C250S427000

Reexamination Certificate

active

07116054

ABSTRACT:
A Hall-type ion source for generation of ion beams for technological applications presents itself a hybrid ion source, where properties of closed drift systems and end-Hall ion sources are combined for more efficient operation. An ion source has shorter central magnetic pole than regular closed drift ion source with magnetic screens that provide positive magnetic gradient in an ion source's discharge channel. An ion source with these combined properties has higher ratio of ion beam current to discharge current than end-Hall ion source and wider range of discharge parameters than closed drift ion source.

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