Charged-particle source, control system, and process using gatin

Details Charged-particle source, control system, and process using gatin Charged-particle source, control system, and process using gatin

1997-06-27

1999-11-09

Bettendorf, Justin P.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

31511131, 250423R, 250424, H01J 2702, H05H 124

Patent

active

059821019

ABSTRACT:
A control system and process for operating a charged-particle source which achieves gating of the charged-particle beam without a mechanical shutter and with very short transition between the beam "on" and beam "off" states is presented. The process and control system provide very precise control of the duration of the charged-particle extraction.

REFERENCES:
patent: 4759948 (1988-07-01), Hashimoto et al.
patent: 5097179 (1992-03-01), Takayama
patent: 5444259 (1995-08-01), Ohmi
patent: 5556521 (1996-09-01), Ghanbari
European Search Report for PCT/US 98/12915, corresponding to U.S. 08/883,696.

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