Sequential method for depositing a film by modulated...
Sequential pulse deposition
Sequential sputter and reactive precleans of vias and contacts
Sequential UV induced chemical vapor deposition
Shallow trench isolation filled by high density plasma chemical
Shape-holding composite pressure sensitive plate
Sheet plasma CVD apparatus
Silica microspheres, method for making and assembling same...
Silicon based films formed from iodosilane precursors and...
Silicon coating process
Silicon device production
Silicon dioxide deposition by plasma activated evaporation...
Silicon nitride components with protective coating
Silicon nitride thin films with improved properties
Silicon nitrogen-based films and method of making the same
Silicon oxide film formation method
Silicon oxide film, method of forming the silicon oxide...
Silicon precursors to make ultra low-K films of K<2.2...
Silicon precursors to make ultra low-K films with high...
Silicon-based film formation process, silicon-based film,...