Silicon coating process

Details Silicon coating process Silicon coating process

1992-10-20

1995-04-11

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Chemical vapor deposition

427237, 427239, 4272481, 427591, 427598, B05D 314

Patent

active

054056586

ABSTRACT:
This invention relates to an improved process for the thermal dehydrogenation of polysilicon granules in a fluidized bed reactor, the improvement which comprises introducing a varying electromagnetic field into the reactor whereby reactor walls are coated with silicon during the dehydrogenation.

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patent: 4868013 (1989-09-01), Allen
patent: 4883687 (1989-11-01), Gautreaux et al.
patent: 4981102 (1991-01-01), Gautreaux et al.
patent: 5041308 (1991-08-01), Kuramoto

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