Shutter for thin-film processing equipment
SiCN compositions and methods
Silicon carbide and other films and method of deposition
Silicon carbide and other films and method of deposition
Silicon carbide deposited by high density plasma...
Silicon carbide filaments and method
Silicon dioxide film forming method
Silicon nitride deposition
Simple chemical vapor deposition system and methods for...
Single substrate processing CVD procedure for depositing a...
Single substrate processing film forming method
Single substrate vacuum processing apparatus having improved exh
Single-substrate-processing CVD method of forming film...
Smooth coating
Smooth surface CVD diamond films and method for producing same
Sol gel formation of polysilicate, titania, and alumina interlay
Solid material comprising a thin metal film on its surface...
Solid state ionic polishing of diamond
Solvated ruthenium precursors for direct liquid injection of...
Solvent vapor annealing of organic films