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Shutter for thin-film processing equipment

Coating processes – Coating by vapor – gas – or smoke
Patent

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SiCN compositions and methods

Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
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Silicon carbide and other films and method of deposition

Coating processes – Coating by vapor – gas – or smoke – Base includes an inorganic compound containing silicon or...
Reissue Patent

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Silicon carbide and other films and method of deposition

Coating processes – Coating by vapor – gas – or smoke – Base includes an inorganic compound containing silicon or...
Reexamination Certificate

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Silicon carbide deposited by high density plasma...

Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
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Silicon carbide filaments and method

Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
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Silicon dioxide film forming method

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Silicon nitride deposition

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Simple chemical vapor deposition system and methods for...

Coating processes – Coating by vapor – gas – or smoke – Metal coating
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Single substrate processing CVD procedure for depositing a...

Coating processes – Coating by vapor – gas – or smoke – Metal coating
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Single substrate processing film forming method

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Single substrate vacuum processing apparatus having improved exh

Coating processes – Coating by vapor – gas – or smoke
Patent

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Single-substrate-processing CVD method of forming film...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Smooth coating

Coating processes – Coating by vapor – gas – or smoke – Metal coating
Patent

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Smooth surface CVD diamond films and method for producing same

Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
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Sol gel formation of polysilicate, titania, and alumina interlay

Coating processes – Coating by vapor – gas – or smoke – Metal coating
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Solid material comprising a thin metal film on its surface...

Coating processes – Coating by vapor – gas – or smoke – Metal coating
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Solid state ionic polishing of diamond

Coating processes – Coating by vapor – gas – or smoke
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Solvated ruthenium precursors for direct liquid injection of...

Coating processes – Coating by vapor – gas – or smoke – Metal coating
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Solvent vapor annealing of organic films

Coating processes – Coating by vapor – gas – or smoke
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