Smooth surface CVD diamond films and method for producing same

Details Smooth surface CVD diamond films and method for producing same Smooth surface CVD diamond films and method for producing same

1994-03-31

1996-06-04

King, Roy V.

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

4272551, 427122, 427314, 264 81, 428408, 423446, 117920, C23C 1626

Patent

active

055231217

ABSTRACT:
Chemical vapor deposition method for producing a fine grained smooth growth surfaced diamond film on a substrate employs a hydrogen/hydrocarbon gaseous atmosphere containing an amount of nitrogen effective to inhibit the growth of the diamond grains deposited on the substrate.

REFERENCES:
patent: 4486286 (1984-12-01), Lewin et al.
patent: 4504519 (1985-03-01), Zelez
patent: 4645977 (1987-02-01), Kurokawa et al.
patent: 4707384 (1987-11-01), Schachner et al.
patent: 4925701 (1990-05-01), Jansen et al.
patent: 4976324 (1990-12-01), Tibbitts
patent: 5071677 (1991-12-01), Patterson et al.
patent: 5169676 (1992-12-01), Moran et al.
Bachmann, P. K. et al. "Emerging Technology of Diamond Thin Films" Chemical & Engineering News May 15, 1989 pp. 24-38.

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