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Use of pulsed grounding source in a plasma reactor

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Use of pulsed grounding source in a plasma reactor

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Use of variable RF generator to control coil voltage...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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UV exposure for improving properties and adhesion of...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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