Coating apparatus – Gas or vapor deposition – Work support
Patent
1994-05-02
1996-01-16
Bueker, Richard
Coating apparatus
Gas or vapor deposition
Work support
118715, 118725, 156345, C23C 1600
Patent
active
054844860
ABSTRACT:
This invention is directed to a novel assembly of replaceable parts for use in a substrate processing apparatus. Covers for the substrate processing surface are attached in a plurality of pieces as opposed to a solid piece, for removeability without removing the wafer support pedestals. A ring for surrounding the pedestal includes a fastener enabling the ring to snap in place onto the pedestal. A focus ring for surrounding the pedestal ring attaches to the pedestal ring via a snug fit into a built-in grooved series of notches in the pedestal ring. A novel fastener that enables two articles to snap together is disclosed.
REFERENCES:
patent: 4823736 (1989-04-01), Post
Blackburn Greg
Johnson Donald L.
McGovern Richard
Rozenzon Yan
Applied Materials Inc.
Bueker Richard
Sgarbossa Peter
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