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Continuous flow deposition system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Continuous in-line deposition system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Continuous thermal evaporation system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Controlling gas in a multichamber processing system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Conveyor for treating hollow bodies comprising an advanced...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Cooling element for a semiconductor fabrication chamber

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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CVD apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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CVD apparatus and method for forming uniform coatings

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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CVD Coating device for small parts

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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CVD plasma reactor

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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CVD reactor having heated process chamber within isolation chamb

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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