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Vapour generator for chemical vapour deposition systems

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Vertical vaporizer for halide-free, silcon-containing compounds

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Vessel for growing thin films by isothermal vapor phase epitaxy

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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