Plasma reactor having a symmetric parallel conductor coil...

Plasma reactor having a symmetrical parallel conductor coil...

Plasma reactor having an inductive antenna coupling power throug

Plasma reactor having an inductive antenna coupling power...

Plasma reactor having RF power applicator and a dual-purpose...

Plasma reactor magnet with independently controllable parallel a

Plasma reactor with a dynamically adjustable plasma source...

Plasma reactor with a tri-magnet plasma confinement apparatus

Plasma reactor with dynamic RF inductive and capacitive...

Plasma reactor with heated source of a polymer-hardening precurs

Plasma reactor with high productivity

Plasma reactor with high selectivity and reduced damage

Plasma reactor with reduced electrical skew using electrical...

Plasma reactors and method of cleaning a plasma reactor

Plasma reactors and method of cleaning a plasma reactor

Plasma source and plasma processing apparatus

Plasma source assembly and method of manufacture

Plasma source for etching

Plasma source for etching

Plasma source for generating inductively coupled, plate-shaped p