Microwave plasma treatment apparatus
Microwave-powered plasma-generating apparatus and method
Miniature microwave plasma torch application and method of...
Model based metal overetch control
Modified transfer function deposition baffles and high...
Modular plasma reactor with local atmosphere
Monitoring substrate processing by detecting reflectively...
Mount for supporting substrates and plasma processing apparatus
Moveable barrier for multiple etch processes
Muffle etch injector assembly
Multi-cathode electron beam plasma etcher
Multi-chamber system having compact installation set-up for...
Multi-planar electrode plasma etching
Multi-ply rolled paper separating device and method of use
Multi-sectional plasma generator with discharge gaps between...
Multi-stage type processing apparatus
Multi-step combined mechanical/thermal process for removing coat
Multi-tipped field-emission tool for nanostructure fabrication
Multi-zone RF inductively coupled source configuration
Multichamber integrated process system