Microwave plasma treatment apparatus

Microwave-powered plasma-generating apparatus and method

Miniature microwave plasma torch application and method of...

Model based metal overetch control

Modified transfer function deposition baffles and high...

Modular plasma reactor with local atmosphere

Monitoring substrate processing by detecting reflectively...

Mount for supporting substrates and plasma processing apparatus

Moveable barrier for multiple etch processes

Muffle etch injector assembly

Multi-cathode electron beam plasma etcher

Multi-chamber system having compact installation set-up for...

Multi-planar electrode plasma etching

Multi-ply rolled paper separating device and method of use

Multi-sectional plasma generator with discharge gaps between...

Multi-stage type processing apparatus

Multi-step combined mechanical/thermal process for removing coat

Multi-tipped field-emission tool for nanostructure fabrication

Multi-zone RF inductively coupled source configuration

Multichamber integrated process system