Modular plasma reactor with local atmosphere

Details Modular plasma reactor with local atmosphere Modular plasma reactor with local atmosphere

1984-03-12

1985-09-03

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118 50, 118715, 156643, 156646, 204298, H01L 21306, C23F 100

Patent

active

045390622

ABSTRACT:
A plasma reactor system is described in which a plurality of components are segregated into modules. Devices known as mass flow controllers for gas supply lines are located one each per module. A plenum for inert gas is connected to each module to bath the module in an inert atmosphere.

REFERENCES:
patent: 4209357 (1980-06-01), Gorin et al.

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