Plastic package for micromechanical devices
Polycrystalline silicon-germanium films for...
Polymeric piezoresistive sensors
Post-release capacitance enhancement in micromachined...
Pressure detecting device
Pressure sensor
Pressure sensor
Pressure sensor component
Pressure sensor for high temperature vibration intense environme
Pressure sensor having gold-silicon eutectic crystal layer...
Pressure sensors and methods of making the same
Pressure transducer and manufacturing method thereof
Pressure transducer comprising a sealed transducer with a rigid
Process for manufacture of micro electromechanical devices...
Process for wafer level treatment to reduce stiction and...