Pressure sensors and methods of making the same

Details Pressure sensors and methods of making the same Pressure sensors and methods of making the same

2005-08-24

2009-11-24

Fahmy, Wael (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S467000, C257S909000, C257S470000, C257SE27006, C438S909000

Reexamination Certificate

active

07622782

ABSTRACT:
A pressure sensor includes a base substrate silicon fusion bonded to a cap substrate with a chamber disposed between the base substrate and the cap substrate. Each of the base substrate and the cap substrate include silicon. The base substrate includes walls defining a cavity and a diaphragm portion positioned over the cavity, wherein the cavity is open to an environment to be sensed. The chamber is hermetically sealed from the environment.

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