Optical targets

Details Optical targets Optical targets

2007-07-24

2007-07-24

Pert, Evan (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

C438S401000, C356S620000, C257SE23179

Reexamination Certificate

active

10697394

ABSTRACT:
An optical target is provided. In one embodiment, the target is formed on a substrate. The target includes a first layer deposited below a second layer on the substrate. The second layer is deposited below a third layer on the substrate. The first layer has a topographic contour formed thereon, the first layer at least partially projecting a patterned topographical contour through the second layer to the third layer.

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