Overlay key, method of manufacturing the same and method of...

Details Overlay key, method of manufacturing the same and method of... Overlay key, method of manufacturing the same and method of...

2005-08-30

2005-08-30

Pham, Long (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

C430S005000, C430S030000, C355S018000

Reexamination Certificate

active

06936931

ABSTRACT:
An overlay key includes a first overlay key having a first main overlay pattern and a first auxiliary pattern, and a second overlay key having a second main overlay pattern and a second auxiliary overlay pattern, the second auxiliary overlay pattern formed at a location corresponding to the first auxiliary overlay pattern.

REFERENCES:
patent: 6529282 (2003-03-01), Stirton et al.
patent: 6573986 (2003-06-01), Smith et al.
patent: 6620557 (2003-09-01), Hosono et al.
patent: 6656644 (2003-12-01), Hasegawa et al.

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