Overlay key, method of manufacturing the same and method of...

Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks

Reexamination Certificate

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Details

C430S005000, C430S030000, C355S018000

Reexamination Certificate

active

06936931

ABSTRACT:
An overlay key includes a first overlay key having a first main overlay pattern and a first auxiliary pattern, and a second overlay key having a second main overlay pattern and a second auxiliary overlay pattern, the second auxiliary overlay pattern formed at a location corresponding to the first auxiliary overlay pattern.

REFERENCES:
patent: 6529282 (2003-03-01), Stirton et al.
patent: 6573986 (2003-06-01), Smith et al.
patent: 6620557 (2003-09-01), Hosono et al.
patent: 6656644 (2003-12-01), Hasegawa et al.

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