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In-situ chemical-mechanical planarization pad metrology...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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In-situ chemical-mechanical planarization pad metrology...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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In-situ endpoint control apparatus for semiconductor wafer polis

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Patent

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In-situ metalization monitoring using eddy current...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Independently controlled read and write head stripe height...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Index table and drive mechanism for a chemical mechanical planar

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Patent

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Index table and drive mechanism for a chemical mechanical...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Infrared end-point detection system

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Integrated endpoint detection system with optical and eddy...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
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Integrated endpoint detection system with optical and eddy...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Interactive device for lapping transducers

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Patent

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Interface assembly for lapping control feedback

Abrading – Precision device or process - or with condition responsive... – Computer controlled
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