Integrated endpoint detection system with optical and eddy...

Details Integrated endpoint detection system with optical and eddy... Integrated endpoint detection system with optical and eddy...

2005-11-22

2005-11-22

Hail, III, Joseph J. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

Computer controlled

C451S006000, C451S007000, C451S008000, C451S041000, C451S207000, C451S288000, C324S230000, C324S232000, C324S237000

Reexamination Certificate

active

06966816

ABSTRACT:
A chemical mechanical polishing apparatus and method can use an eddy current monitoring system and an optical monitoring system. Signals from the monitoring systems can be combined on an output line and extracted by a computer. A thickness of a polishing pad can be calculated. The eddy current monitoring system and optical monitoring system can measure substantially the same location on the substrate.

REFERENCES:
patent: 4005359 (1977-01-01), Smoot
patent: 4112365 (1978-09-01), Larson et al.
patent: 4303885 (1981-12-01), Davis et al.
patent: 4467281 (1984-08-01), Davis et al.
patent: 4556845 (1985-12-01), Strope et al.
patent: 4673877 (1987-06-01), Sakamoto et al.
patent: 4715007 (1987-12-01), Fujita et al.
patent: 4716366 (1987-12-01), Hosoe et al.
patent: 4829251 (1989-05-01), Fischer
patent: 4849694 (1989-07-01), Coates
patent: 4963500 (1990-10-01), Cogan
patent: 4977853 (1990-12-01), Falcoff et al.
patent: 5001356 (1991-03-01), Ichikawa
patent: 5003262 (1991-03-01), Egner et al.
patent: 5081796 (1992-01-01), Schultz
patent: 5140265 (1992-08-01), Sakiyama et al.
patent: 5213655 (1993-05-01), Leach et al.
patent: 5237271 (1993-08-01), Hedengren
patent: 5343146 (1994-08-01), Koch et al.
patent: 5355083 (1994-10-01), George et al.
patent: 5357331 (1994-10-01), Flockencier
patent: 5413941 (1995-05-01), Koos et al.
patent: 5427878 (1995-06-01), Corliss
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5451863 (1995-09-01), Freeman
patent: 5511005 (1996-04-01), Abbe et al.
patent: 5525903 (1996-06-01), Mandl et al.
patent: 5541510 (1996-07-01), Danielson
patent: 5559428 (1996-09-01), Li et al.
patent: 5605760 (1997-02-01), Roberts
patent: 5609511 (1997-03-01), Moriyama et al.
patent: 5640242 (1997-06-01), O'Boyle et al.
patent: 5644221 (1997-07-01), Li et al.
patent: 5658183 (1997-08-01), Sandhu et al.
patent: 5660672 (1997-08-01), Li et al.
patent: 5663797 (1997-09-01), Sandhu
patent: 5672091 (1997-09-01), Takahashi et al.
patent: RE35703 (1997-12-01), Koch et al.
patent: 5708506 (1998-01-01), Birang
patent: 5719495 (1998-02-01), Moslehi
patent: 5730642 (1998-03-01), Sandhu et al.
patent: 5731697 (1998-03-01), Li et al.
patent: 5733171 (1998-03-01), Allen et al.
patent: 5762537 (1998-06-01), Sandhu et al.
patent: 5791969 (1998-08-01), Lund
patent: 5807165 (1998-09-01), Uzoh et al.
patent: 5838447 (1998-11-01), Hiyama et al.
patent: 5851135 (1998-12-01), Sandhu et al.
patent: 5865666 (1999-02-01), Nagahara
patent: 5872633 (1999-02-01), Holzapfel et al.
patent: 5889401 (1999-03-01), Jourdain et al.
patent: 5893796 (1999-04-01), Birang et al.
patent: 5899792 (1999-05-01), Yagi
patent: 5911619 (1999-06-01), Uzoh et al.
patent: 5913713 (1999-06-01), Cheek et al.
patent: 5929994 (1999-07-01), Lee et al.
patent: 5948203 (1999-09-01), Wang
patent: 5949927 (1999-09-01), Tang
patent: 5964643 (1999-10-01), Birang et al.
patent: 6004187 (1999-12-01), Nyui et al.
patent: 6034781 (2000-03-01), Sarfaty et al.
patent: 6068539 (2000-05-01), Bajaj et al.
patent: 6071178 (2000-06-01), Baker, III
patent: 6120348 (2000-09-01), Fujita et al.
patent: 6159073 (2000-12-01), Wiswesser et al.
patent: 6179709 (2001-01-01), Redeker et al.
patent: 6190234 (2001-02-01), Swedek et al.
patent: 6254459 (2001-07-01), Bajaj et al.
patent: 6280289 (2001-08-01), Wiswesser et al.
patent: 6296548 (2001-10-01), Wiswesser et al.
patent: 6309276 (2001-10-01), Tsai et al.
patent: 6407546 (2002-06-01), Le et al.
patent: 6431949 (2002-08-01), Ishikawa et al.
patent: 6433541 (2002-08-01), Lehman et al.
patent: 6448795 (2002-09-01), Ermakov et al.
patent: 6458014 (2002-10-01), Ishikawa et al.
patent: 6558229 (2003-05-01), Kimura et al.
patent: 6563308 (2003-05-01), Nagano et al.
patent: 6575825 (2003-06-01), Tolles et al.
patent: 6586337 (2003-07-01), Parikh
patent: 6621264 (2003-09-01), Lehman et al.
patent: 6663469 (2003-12-01), Kimura et al.
patent: 6707540 (2004-03-01), Lehman et al.
patent: 2001/0008827 (2001-07-01), Kimura et al.
patent: 2002/0002029 (2002-01-01), Kimura et al.
patent: 2002/0013124 (2002-01-01), Tsujimura et al.
patent: 2002/0077031 (2002-06-01), Johansson et al.
patent: 2002/0098777 (2002-07-01), Laursen et al.
patent: 0 460 348 (1991-12-01), None
patent: 0 663 265 (1995-07-01), None
patent: 0 640 438 (1995-09-01), None
patent: 0 738 561 (1996-10-01), None
patent: 0 881 040 (1998-12-01), None
patent: 0 881 484 (1998-12-01), None
patent: 0 402 527 (2000-12-01), None
patent: 1 116 552 (2001-07-01), None
patent: 1-136009 (1989-05-01), None
patent: 3-234467 (1991-10-01), None
patent: 3-295409 (1991-12-01), None
patent: 7-091948 (1995-04-01), None
patent: 01/46684 (2001-06-01), None
patent: WO 01/89765 (2001-11-01), None

Affiliated with

Also associated with

Rating

Integrated endpoint detection system with optical and eddy... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated endpoint detection system with optical and eddy..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated endpoint detection system with optical and eddy... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3488636