Index table and drive mechanism for a chemical mechanical planar

Details Index table and drive mechanism for a chemical mechanical planar Index table and drive mechanism for a chemical mechanical planar

1997-08-08

1999-11-02

Rose, Robert A.

Abrading

Precision device or process - or with condition responsive...

Computer controlled

451288, B24B 722

Patent

active

059759860

ABSTRACT:
A machine for polishing semiconductor wafers including a rotatable index table and a drive mechanism for the index table. The index table temporarily accommodates wafers between processing steps. The drive mechanism includes a continuously circulating grooved timing belt that engages gear teeth formed on an outside diameter portion of the index table to effect rotation of the index table. The index table includes a large diameter central opening for accommodating passage of other system components.

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