Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2006-07-04
2006-07-04
Wilson, Lee D. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S006000, C451S041000, C451S285000, C324S225000, C438S013000
Reexamination Certificate
active
07070476
ABSTRACT:
A method for measuring conductance of a sample using an eddy current probe with a sensing coil. The method includes N repetitions of measuring first and second voltage pairs including in-phase and quadrature components of an induced AC voltage in the sensing coil, calibrating the first signal based on the measured second signal at a different separation from the sample and reference material, determining a conductance function relating conductance with location along the selected curve, processing the calibrated first voltage pairs to generate a lift-off curve, determining an intersection voltage pair representing intersection of the lift-off curve with a selected curve, and determining the conductance of the sample from the intersection voltage pair and the conductance function.
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Fielden John
Johnson, III Walter Halmer
Lee Shing M.
Lehman Kurt R.
Beyer Weaver & Thomas LLP.
KLA-Tencor Corporation
Ojini Anthony
Wilson Lee D.
LandOfFree
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