Carrier head to apply pressure to and retain a substrate

Carrier head with a flexible membrane

Carrier head with a flexible membrane

Carrier head with a flexible membrane and adjustable edge...

Carrier head with a flexible membrane for a chemical mechanical

Carrier head with a flexible membrane for a chemical mechanical

Carrier head with a flexible membrane for a chemical...

Carrier head with a flexible membrane for a chemical...

Carrier head with a flexible membrane for a chemical...

Carrier head with a flexible membrane to form multiple chambers

Carrier head with a flexure

Carrier head with a layer of conformable material for a chemical

Carrier head with a non-stick membrane

Carrier head with a non-stick membrane

Carrier head with a removable retaining ring for a chemical mech

Carrier head with a vibration reduction feature for a...

Carrier head with controllable edge pressure

Carrier head with controllable pressure and loading area for...

Carrier head with edge control for chemical mechanical polishing

Carrier head with flexible membranes to provide controllable...